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Particle Counting Instrumentation & Systems |
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Vacuum |
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Cesstech offers the HYT range of vacuum particle sensors complete with controllers and software.
These
vacuum particle sensors detect particles in non-corrosive, vacuum process equipment and can be installed in
loadlock, process chambers or into exhaust pump lines. These sensors allow sensitivity levels to 0.17µm and
compatibility with most process conditions.
The complete vacuum particle monitoring system consists of the in
situ particle sensors, a controller and the Particle Vision software that allows data acquisition and statistical
process control. |
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Model PM-250E
In-Situ Particle Monitor Controllers |
| Features : |
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Data buffering and support of real-time tasks simplifies integration into host systems
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Eight independent opto-isolated Machine Trigger™
inputs allow synchronization of data collection during
key process steps |
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Sensor response is userprogrammable to optimize sensor
performance for each process step |
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Model 20SXG/25SXG
Vacuum Particle Sensor |
| Features : |
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High power laser diode for 0.19 micron sensitivity and
large detection area |
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Ultra compact probe design |
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In-chamber monitoring |
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Model Particle Vision II
Software for Vacuum Monitoring Systems |
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Event and recipe stepsynchronized data collection |
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Large data display |
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Rolling statisitics |
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