M3350/3360/3370/3390
Multi-Channel Field Voltage Detection |
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Digital, microprocessor-based controllers,
multi-channel,
digital I/O,
auxiliary I/O, local addressability,
RS-485, and
Modbus data output |
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Multiple antenna configurations including passive, active,
and high speed electrometer |
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Precision resolution |
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Programmable closed-loop control
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Programmable alarm set-points with tool shutdown option |
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Voltage/polarity displays, local red/green LEDs each channel
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Provides easy integration, cost/performance advantages
over other monitoring solutions, direct communication to
other Novx instruments, a tool controller, or PEMS |
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Detect field voltage in a wide variety of applications:
Monitor field voltage at distances, monitor ionizer balance,
and perform In Situ decay testing without the added
expense of a CPM |
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Measure and record field voltage down to 0.1V
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Enable closed-loop feedback control to select ionizers based on balance or decay test results for up to 3 SSDC ionizer
fans or a 3 fan blower |
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Reduce process variations, decrease scrap/rework,
and improve process yields |
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Visual indicators at the instrument
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